ZAO is an actuator featuring a frictionless bearing arrangement and a light moving mass, ensuring very low and repeatable force application as well as low force overshoot at impact on a contact surface. Built to take full advantage of ETEL’s sensorless force control algorithm, ZAO allows simultaneously a very tight force control accuracy (0.2 N ±10%) and a very high dynamics capability (up to 20 g’s).

ZAO aims to address the new semiconductor back-end and electronics challenges driven by the new advanced packaging technologies and materials, specifically ensuring the integrity of fragile component or target substrates without compromising the machine throughput.

Among other applications, ZAO is therefore perfectly suited for pick and place, die bonding and probing machines.

Coupled to AccurET’s controller, ZAO force controlled actuator provides you with a state-of-the-art solution to reduce your machine cost of ownership while taking up your next force control challenge!

Main specifications

• Total stroke: 27 mm
• Acceleration: 20 g
• Nominal force application: 0.2 to 2 N
• Force stability at force level 0.2N: ± 3 mN
• Typical move and force: 8.5 mm ± 0.3 mm & 0.2 N ± 0.04N in 60 ms

Ask for the corresponding Integration Manual for more information.